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发明名称
Halbleiterschaltung mit einem Kontakt mit niedrigem Widerstand und ihr Herstellungsverfahren
摘要
申请公布号
DE69229983(D1)
申请公布日期
1999.10.21
申请号
DE1992629983
申请日期
1992.07.15
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI
发明人
KUNISHIMA, IWAO;SUGURO, KYOICHI
分类号
H01L21/225;H01L21/28;H01L21/285;H01L21/336;H01L29/45;H01L29/78;(IPC1-7):H01L21/285;H01L21/223
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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