发明名称 ORGANIC ELECTROLUMINESCENCE ELEMENT AND MANUFACTURING METHOD THEREFOR
摘要 An organic EL element having a first electrode planarized and a manufacturing method therefor are provided. After an ITO film (11) which is the first electrode is formed on a glass substrate (10), a planarization level film (12) is formed and patterned to form a planarization level film (12a). In addition, the ITO film (11) is over-etched to form an ITO film (11a), and an undercut portion (15) is generated. After a planarization film (14) which is an insulating film is applied on the entire surface, the major part of the planarization film (14) and the planarization level film (12a) are removed, thereby causing an insulating film (14a) formed in the undercut portion (15) to remain with the same thickness as the ITO film (11a).
申请公布号 WO9953726(A1) 申请公布日期 1999.10.21
申请号 WO1998JP01652 申请日期 1998.04.10
申请人 TDK CORPORATION;KODAMA, MITSUFUMI 发明人 KODAMA, MITSUFUMI
分类号 H01L27/32;H01L51/50;H01L51/52;H05B33/10;H05B33/12;H05B33/22;H05B33/26 主分类号 H01L27/32
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