发明名称 Resin-bound polishing material for polishing semi-conductor wafers and glass fiber end faces
摘要 A resin-bound polishing material (I) is prepared by mixing an aqueous suspension of a colloidal polishing agent with a higher alcohol, followed by evaporation of water from the mixture such that the colloidal polishing agent containing alcohol polymerizes and is applied as a layer to a substrate and hardened.
申请公布号 DE19817555(A1) 申请公布日期 1999.10.21
申请号 DE19981017555 申请日期 1998.04.15
申请人 OTTOW, MANFRED 发明人 OTTOW, MANFRED
分类号 C08G63/49;C08J5/14;C09G1/02;C09K3/14;G02B6/38;(IPC1-7):C08J5/14;B24B9/14;C08K3/36;C09G1/16;C30B33/00;H01L21/302 主分类号 C08G63/49
代理机构 代理人
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