METHOD AND DEVICE FOR ANALYZING X-RAY DIFFRACTION

摘要

PROBLEM TO BE SOLVED: To reliably measure in-plane diffraction even at a laboratory level without any need for constructing a large-scale facility by easily creating paral lel X-ray beams with a high intensity. SOLUTION: In a method, an X-ray diffraction method for detecting in-plane diffraction rays being diffracted on a crystal surface that is vertical to a sample surface using an X-ray counter 8 is made when X rays R1 are applied to a sample 7 at a small incidence angleδ. X rays being generated from an X-ray source F are diffracted by a parabolic surface multilayer film monochrometer 1 and then are applied to the sample 7. The parabolic surface multilayer film monochrometer 1 is formed by laminating a heavy element layer and a light element layer alternately for a plurality of times, and further a surface that is the surface of the parabolic surface multilayer film monochrometer 1 and where X rays are applied is formed on the parabolic surface. The parabolic surface multilayer film monochrometer 1 can form parallel X-ray beams with an extremely high intensity, thus reliability measuring in-plane diffraction.