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发明名称
Colloidal silica slurry for nip plated disk polishing
摘要
申请公布号
SG68084(A1)
申请公布日期
1999.10.19
申请号
SG19980004347
申请日期
1998.10.28
申请人
KOMAG INCORPORATED.
发明人
JIA KANG
分类号
B24B37/00;C09G1/02;C09K3/14;(IPC1-7):C09K3/14
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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