发明名称 LASER BEAM MACHINE
摘要 PROBLEM TO BE SOLVED: To provide a laser beam machine having improved through-put, machining accuracy, accuracy in the machining position etc., by providing the optimum data preparing function for optimizing the machining order of a machining point in a central processing unit. SOLUTION: A work 3 placed on a stage 2 movable in the two-dimensional XY direction is irradiated with the laser beam emitted from a laser beam oscillator 4, and machined. A laser beam machine 1 is provided with a central processing unit 10 to achieve various controls by the program, and the central processing unit 10 includes an optimum control data preparing function part 11 and a control function part 12. The optimum control data preparing function part 11 sorts the machining points, arranging the machining points with the same coordinate values, and splits them into segments, and rearranges the machining points so as to obtain the shortest route by the segment units to prepare the optimum data to optimize the machining order of the machining points. The control function part 12 controls the positioning of the laser beam oscillator 4, an outer shutter 5, and the stage 2 based on the optimum data.
申请公布号 JPH11285870(A) 申请公布日期 1999.10.19
申请号 JP19980089091 申请日期 1998.04.01
申请人 NEC CORP 发明人 ONOMA YOSHIMI;EDAHIRO MASATO
分类号 B23K26/00;B23K26/08;H01L21/768;(IPC1-7):B23K26/00 主分类号 B23K26/00
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