发明名称 Apparatus for performing quantitative measurement of DC and AC current flow in integrated circuit interconnects by measurement of magnetic fields with a magneto optic laser probe
摘要 A laser probe for measuring a magnetic field is disclosed. A polarized laser beam is passed through a magneto-optic crystal in the presence of an unknown magnetic field. The rotation of the polarization which occurs through the magneto-optic crystal is measured in order to determine the magnitude of the magnetic field. The measured magnetic field is used to determine, for example, the current through a conductor such as an interconnect line on a semiconductor chip. A method of calibrating the magnetic field using a known magnetic from a solenoid is also disclosed. Further disclosed is a method of providing a zero-reference current by momentarily stopping the chip clock.
申请公布号 US5969517(A) 申请公布日期 1999.10.19
申请号 US19980024008 申请日期 1998.02.13
申请人 INTEL CORPORATION 发明人 RAO, VALLURI RAMANA M.
分类号 G01R15/24;(IPC1-7):G01R31/00 主分类号 G01R15/24
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