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发明名称
SEMICONDUCTOR MANUFACTURING DEVICE EQUIPPED WITH MEANS FOR HEATING EXHAUST PIPE
摘要
申请公布号
JPH11288927(A)
申请公布日期
1999.10.19
申请号
JP19980093235
申请日期
1998.04.06
申请人
KOKUSAI ELECTRIC CO LTD
发明人
FUKUMURA NORIYUKI
分类号
C23C16/44;H01L21/205;H01L21/31;(IPC1-7):H01L21/31
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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