SUBSTRATE TREATING DEVICE,申请号JP19980355151-传众专利搜索

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发明名称	SUBSTRATE TREATING DEVICE
摘要
申请公布号	JPH11285662(A)	申请公布日期	1999.10.19
申请号	JP19980355151	申请日期	1998.12.14
申请人	TOKYO ELECTRON LTD	发明人	SAKAI MITSUHIRO
分类号	B05C11/08;G02F1/13;G02F1/133;G03F7/16;H01L21/027;(IPC1-7):B05C11/08	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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