| 摘要 |
A wavelength tunable semiconductor laser light source, which has an external resonator semiconductor laser source unit; an optical filter for selecting an output beam of the external resonator semiconductor laser source unit in a single mode; a drive unit for changing wavelength of a transmitted beam or of a reflected beam, from the optical filter; and a control unit for controlling the drive unit; a first beam splitting device for receiving the output beam of the external resonator semiconductor laser source unit as one of incident beams and for outputting it into two branches; an etalon for receiving one of output beams from the first beam splitting device; a measuring unit for etalon transmittance, for measuring a transmittance of the etalon to transmit it to the control unit; and a wavemeter for specifying a wavelength of the output beam of the semiconductor laser source unit with an accuracy in a free spectral range of the etalon, on the basis of the output beam of the semiconductor laser source unit or on the basis of information from the drive unit, to output the specified wavelength to the control unit.
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