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发明名称
摘要
申请公布号
JPH11512236(A)
申请公布日期
1999.10.19
申请号
JP19980510314
申请日期
1997.07.23
申请人
发明人
分类号
H01L21/265;H01L21/04;(IPC1-7):H01L21/265
主分类号
H01L21/265
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