GAS MIXING DEVICE AND PRODUCTION OF GAS DISCHARGE PANEL

摘要

PROBLEM TO BE SOLVED: To enhance a yield of production of the panel. SOLUTION: This device is provided with five gas cylinders B1-B5, five pieces of mass flow controllers 11 and a mixer 12. The mixer 12 has a spiral staircase structure for generating an action to rotate a gas against the advancing direction of the gas inside a gas passing tube. Thus, since plural kinds of gas can be surely mixed and also the mixed gas suited to characteristics of respective panels can be sealed during a discharging process or after the process, the yield of the product enables to be enhanced.