Apparatus for heating a transparent substrate utilizing an incandescent lamp and a heating disk emitting infrared wavelengths

摘要

A heating disk is located inside a vacuum chamber between a substrate holder inside the chamber and a lamp outside the chamber. The lamp emits radiation in a wavelength range which passes through a glass plate in the chamber wall but is absorbed by the heating disk, which may consist of graphite. When the disk is heated to 1000 DEG K. it emits radiation in a wavelength range which can be absorbed by a transparent substrate in the holder.