发明名称 Semiconductor device comprising a plurality of interconnection patterns
摘要 On transistors P1, P2, N1 and N2 constituting an NAND gate, interconnection pattern W of metal having high melting point and aluminum interconnection patterns Al1 and Al2 are stacked. A local line LL for connecting transistors P1, P2, N1 and N2 to each other is formed by the interconnection pattern W of metal having high melting point, signal lines SL and SL' for signal input/output between the NAND gate and the outside are formed by aluminum interconnection pattern Al1, and power supply lines VL and VL' for applying power supply potentials Vcc and Vss to the NAND gate are formed by the aluminum interconnection pattern Al2. As compared with the prior art in which the local line LL is formed by the aluminum interconnection pattern Al1, the degree of freedom in layout can be improved and the layout area can be reduced.
申请公布号 US5969420(A) 申请公布日期 1999.10.19
申请号 US19970881397 申请日期 1997.06.24
申请人 MITSUBUSHI DENKI KABUSHIKI KAISHA 发明人 KUGE, SHIGEHIRO;ARIMOTO, KAZUTAMI;TSUKUDE, MASAKI;FUJISHIMA, KAZUYASU
分类号 H01L21/28;H01L21/3205;H01L21/768;H01L21/82;H01L21/822;H01L21/8242;H01L23/52;H01L23/522;H01L23/528;H01L25/04;H01L25/18;H01L27/02;H01L27/04;H01L27/108;(IPC1-7):H01L23/48 主分类号 H01L21/28
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