| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electron beam irradiator that makes it possible to prevent the problem of the convergence of an electron beam at the maximum point in scanning and stably obtain an irradiated surface with uniform energy density for the entire surface. SOLUTION: In an electron beam irradiator 11 equipped with an electron beam source 12, an acceleration tube 13 for accelerating electrons emitted from the electron beam source 12, a focusing electromagnet 16 that controls the beam diameter by applying a magnetic field to a high-energy electron beam generated in the acceleration tube 13 and an electromagnet 17 that deflects and scans the electron beam by applying a magnetic field to the electron beam whose diameter is controlled, the electric current IF of the focusing electromagnet 16 is controlled so as to that the beam diameter can culminate at the maximum point in scanning by superposing current components synchronized with the current IS of the scanning electromagnetic 17 on the current IF of the focusing electromagnet 16.</p> |
