PAD CONDITIONER OF CMP DEVICE,申请号KR19970019741-传众专利搜索

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发明名称	PAD CONDITIONER OF CMP DEVICE
摘要
申请公布号	KR100223953(B1)	申请公布日期	1999.10.15
申请号	KR19970019741	申请日期	1997.05.21
申请人	HANKOOK MACHINE TOOLS CO.,;JEONG, HAE DO	发明人	JEONG, HAE DO;AHN, DAE KYUN
分类号	B24B53/017;B24B37/00;H01L21/304;(IPC1-7):B24B37/00	主分类号	B24B53/017
代理机构		代理人
主权项
地址

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