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发明名称
QUINONEDIAZIDE/NOVOLAK POSITIVE ELECTRON BEAM RESIST DEVELOPER
摘要
申请公布号
KR100201576(B1)
申请公布日期
1999.10.15
申请号
KR19987008313
申请日期
1998.10.16
申请人
TORAY INDUSTRIES INC.
发明人
OOSEDO, HIROKI;KATAOKA, MUTSUO;KANETSUKI, SHIGEYOSHI;TAMURA, KAZUTAKA;ASANO, MASAYA
分类号
G03F7/00;(IPC1-7):G03F7/00
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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