RÖNTGENSTRAHLMASKENSTRUKTUR UND - BELICHTUNGSVERFAHREN SOWIE DAMIT HERGESTELLTES HALBLEITERBAUELEMENT UND HERSTELLUNGSVERFAHREN FÜR DIE RÖNTGENSTRAHLMASKENSTRUKTUR

摘要

An X-ray mask structure comprises an X-ray absorber having a desired pattern, an X-ray permeable film supporting the X-ray absorber, and a supporting frame for supporting the X-ray permeable film. The X-ray mask structure has a metal oxide film formed on the portion of the X-ray permeable film having no X-ray absorber thereon.