TFT ARRAY FOR LIQUID CRYSTAL DISPLAY DEVICE, ITS PRODUCTION, LIQUID CRYSTAL DISPLAY DEVICE USING THAT, AND PRODUCTION OF THAT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a TFT array having a polysilicon film as an active layer having uniform electric field effect mobility in the direction in a plane at the time of the production of a large-area liquid crystal display device, and to provide a liquid crystal display device using the array. SOLUTION: After a buffer layer 2, a polysilicon layer 4, a gate insulating layer 5 and a gate electrode 6 are successively formed on a glass substrate 1, impurities are injected to form a source region 10 and a drain region 9. In the process of forming the polysilicon layer 4, silicon being the vapor source is vaporized by using a pressure-gradient plasma gun, the vaporized silicon particles are excited in a plasma region and the excited particles are made to irradiate the glass substrate 1 to form the polysilicon layer. Since ionized particles having high energy are used, the obtd. polysilicon thin film has high migration and can be used in a deposited state as it is for transistors for pixel switches.