METHOD AND DEVICE FOR SUBSTRATE COATING USING A MAGNETRON CATHODE,申请号KR19910009593-传众专利搜索

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发明名称	METHOD AND DEVICE FOR SUBSTRATE COATING USING A MAGNETRON CATHODE
摘要
申请公布号	KR100224507(B1)	申请公布日期	1999.10.15
申请号	KR19910009593	申请日期	1991.06.11
申请人	BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG	发明人	BEISSWENGER, SIEGFRIED;FRITSCHE, WOLF-ECKART;KUKLA, REINER;BEISSWENGER, SIEGFRIED
分类号	C23C14/35;C23C14/34;H01J37/34;(IPC1-7):H01J25/50	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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