METHOD OF MANUFACTURING PHASE SHIFTING MASK,申请号KR19960049955-传众专利搜索

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发明名称	METHOD OF MANUFACTURING PHASE SHIFTING MASK
摘要
申请公布号	KR100223812(B1)	申请公布日期	1999.10.15
申请号	KR19960049955	申请日期	1996.10.30
申请人	HYUNDAI MICRO ELECTRONICS CO.,LTD.	发明人	CHON, YOUNG-KWON;LEE, JOON-SUK;PARK, CHAN-MIN
分类号	H01L21/30;(IPC1-7):H01L21/30	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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