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发明名称
ION IMPLANTATION SIMULATION METHOD
摘要
申请公布号
JPH11283932(A)
申请公布日期
1999.10.15
申请号
JP19980083665
申请日期
1998.03.30
申请人
NEC CORP
发明人
SAKAMOTO HIRONORI
分类号
H01L21/265;H01L21/00;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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