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发明名称
DEFECT INSPECTING APPARATUS
摘要
申请公布号
JPH11281337(A)
申请公布日期
1999.10.15
申请号
JP19980262520
申请日期
1998.09.17
申请人
KOBE STEEL LTD;GENESIS TECHNOLOGY KK
发明人
YOSHIDA NAOYUKI;TAKAMATSU HIROYUKI;SUMINOE SHINGO;KATSUMI HIDEO;MORIMOTO TSUTOMU;IMANISHI AKIFUMI;HASHIZUME HIDEHISA;YAMAMOTO YUJI
分类号
H01L21/66;G01B11/30;G01N21/88;G01N21/956;(IPC1-7):G01B11/30
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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