| 摘要 |
PROBLEM TO BE SOLVED: To provide an exposure device which can be made small in size, can be reduced in weight and performs a highly precise exposing operation. SOLUTION: A light source and an optical system of illumination, etc., are supported by the component materials, such as the first pedestal 3, having a hollow part, the second retaining part 8, the first base 9, the second base 5 and the second pedestal 11, etc. An exposing device can be made small in size and its weight can be reduced by arranging the pipings 18 and 19, to be connected to a structure in each hollow part, and a wiring code 22, etc., in each hollow part, and the complicatedness of the circumference of the device is removed. In addition, the fluctuations of air pressure and the swinging of air resulted from the rise of temperature of the circumference of the exposing device are prevented by flowing a fluid having cooling function into each hollow part, and a highly precise exposure can be accomplished. Also, the vibration generated in the exposing device is suppressed by filling up a vibration damping material 13 into each hollow part, and the accuracy and the stability of exposure can be improved. |
