发明名称 EXPOSING DEVICE, MANUFACTURE THEREOF, AND DISCHARGE LAMP
摘要 <p>PROBLEM TO BE SOLVED: To provide an exposing device which can be used for discharge lamps of different types. SOLUTION: A sensor, which recognizes the type of discharge lamp 1 mounted on the light source of an exposing device, is provided, and at least one of the optical condition, the power source condition and the cooling condition of an exposing device is provided, based on the recognition. For example, the optical condition is changed by adjusting the zoom-in lens 3 of an illuminating optical system, in accordance with the type of the discharge lamp 1, or the allowable power range of the discharge lamp 1 is set in, accordance with the type of the discharge lamp 1, and the condition of power source is changed, or the cooling power of the discharge lamp 1 is changed.</p>
申请公布号 JPH11283898(A) 申请公布日期 1999.10.15
申请号 JP19980081378 申请日期 1998.03.27
申请人 CANON INC 发明人 SATO TERUYA
分类号 H01L21/027;G03F7/20;(IPC1-7):H01L21/027 主分类号 H01L21/027
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