| 摘要 |
PROBLEM TO BE SOLVED: To enable an excellent-quality accumulated film to be formed on a substrate by spraying water toward the surface of the substrate from plural nozzle groups which are positionally mutually twisted to wash the substrate. SOLUTION: The substrate is transported to a high-pressure shower rinse tank by a transportation mechanism and the water is jetted from shower nozzles. In this case, two or more shower nozzles are arranged at an equal interval on a concentric circle so as to constitude the shower nozzle group. Besides, this device is provided with plural shower nozzle groups. The nozzles 702 constituting one shower nozzle group and the nozzles 701 constituting the different shower nozzle group are set so that the positions thereof are twisted. That means, they are arranged so that the respective positions thereof are deviated in the shaft direction of a shaft 710 vertically passed through the circular surface 711 of the substrate. Besides, the nozzles 702 and the nozzles 701 are fitted to shower rings 703-1 and 703-2 by being provided with a variable jetting angle 704 and a variable installing angle 701 so that the substrate is washed and dust and the like are eliminated besides. |
