| 摘要 |
PROBLEM TO BE SOLVED: To provide a pulse laser device for optimum setting and control of the flow speed of laser gas. SOLUTION: Flow velocity of laser gas (V) is so controlled as to satisfy all relationships, given below, among the laser gas flow velocity (V), pulse repetition frequency (PPS), discharge width (W), and center-center distance (L) between main electrodes 2a and 2b and preliminary ionization electrodes 2c and 2d. (V/PPS)>=2W...I n.Li=n.(V/PPS)<(L-W/2)=La...II (n+1).Li=(n+1).(V/PPS)>(L+W/2)=Lb...III where, n is 0 or positive integer value. |
