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发明名称
SUBSTRATE TRANSFER APPARATUS
摘要
申请公布号
KR100225771(B1)
申请公布日期
1999.10.15
申请号
KR19960049970
申请日期
1996.10.30
申请人
DAI NIPPON SCREEN MFG. CO., LTD.
发明人
KENJI, FUJII;KATSUMI, SHIMAJI;MITSUO, OGASAWARA;YOSHIHIKO, MATSUSHITA
分类号
B65G49/06;B65G47/90;B65G49/07;H01L21/68;(IPC1-7):H01L21/68
主分类号
B65G49/06
代理机构
代理人
主权项
地址
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