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发明名称
TURBO-MOLECULAR PUMP
摘要
申请公布号
JPH11280690(A)
申请公布日期
1999.10.15
申请号
JP19980099989
申请日期
1998.03.27
申请人
EBARA CORP
发明人
IKEGAMI TETSUMASA;MIYAMOTO MATSUTARO
分类号
F04D19/04;(IPC1-7):F04D19/04
主分类号
F04D19/04
代理机构
代理人
主权项
地址
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