| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for the hardened film excellent in low permittivity, flatness, heat resistance, solvent resistance, transparence, insulation resistance, process allowance, and the like. SOLUTION: The alkali-soluble thermosetting resin is patternized by (1) coating a substrate with an alkali-soluble thermosetting resin and baking it, (2) coating the baked film with a radiation-sensitive resin composition, (3) irradiating it with radiation through a prescribed mask, (4) developing it with an alkaline developing solution, (5) immersing it in a peeling solution, and (6) heating in to 100-300 deg.C. |
