AUTOMATIC PRESSURE CONTROL SYSTEM FOR NITROGEN BOX USE PROCESS OF MANUFACTURING SEMICONDUCTOR DEVICE,申请号KR19960049872U-传众专利搜索

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发明名称	AUTOMATIC PRESSURE CONTROL SYSTEM FOR NITROGEN BOX USE PROCESS OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号	KR200158396(Y1)	申请公布日期	1999.10.15
申请号	KR19960049872U	申请日期	1996.12.16
申请人	HYUNDAI MICRO ELECTRONICS CO.,LTD.	发明人	WOO, CHANG WHUN
分类号	H01L21/22	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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