发明名称 |
THIN FILM PIEZOELECTRIC DEVICE AND THE MANUFACTURING METHOD THEREOF |
摘要 |
Embodiments of the present invention provide a small and well-characterized bulk acoustic wave device by fabricating a filter having a wide band width or a resonator having a wide oscillation frequency range together with a semiconductor circuit. In embodiments of the present invention, a bulk acoustic wave device comprises a semiconductor substrate having a dielectric substance layer thereon, the dielectric substance layer has a ground conductor layer thereon, the ground conductor layer has a piezoelectric ceramic thin film thereon and the piezoelectric ceramic thin film has a conductive electrode pattern thereon. The thickness of the piezoelectric ceramic thin film is more than ten times the thickness of the ground conductor layer, and the wave number of acoustic waves that propagate in a direction parallel to a surface of the piezoelectric ceramic thin film multiplied by the thickness of the piezoelectric ceramic thin film is less than 2. |
申请公布号 |
KR100225815(B1) |
申请公布日期 |
1999.10.15 |
申请号 |
KR19960021966 |
申请日期 |
1996.06.18 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
WADAKA, SHUSOU;MISU, KOICHIRO;NAGATSUKA, TSUTOMU;KIMURA, KOMONORI;KAMEYAMA, SHUNPEI;MAEDA, CHISAKO;YAMADA, AKIRA;HONDA, TOSHIHISA |
分类号 |
H01L41/08;H01L41/187;H01L41/22;H03B5/30;H03B5/32;H03H3/02;H03H9/02;H03H9/05;H03H9/13;H03H9/145;H03H9/17;H03H9/25;H03H9/54;H03H9/56 |
主分类号 |
H01L41/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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