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发明名称
STATIC ELECTRICITY ABSORPTION IMPLEMENTS
摘要
申请公布号
KR100224967(B1)
申请公布日期
1999.10.15
申请号
KR19960033287
申请日期
1996.08.10
申请人
ANELVA CORPORATION
发明人
TAKAHIRO, TAMURA
分类号
B23Q3/15;C23C16/44;C23C16/458;H01L21/205;H01L21/683;(IPC1-7):H01L21/68
主分类号
B23Q3/15
代理机构
代理人
主权项
地址
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