发明名称 |
Sign correction method for reflectance anisotropy measurements on rotating samples |
摘要 |
The method involves de-adjusting a spherical mirror for setting a low 1-omega component of the constant component of the RAS signal. The constant component and the differential component of the RAS measurement signal are then determined separately. The sign of the RAS signal is determined from the phase of the constant and differential components.
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申请公布号 |
DE19825390(C1) |
申请公布日期 |
1999.10.14 |
申请号 |
DE19981025390 |
申请日期 |
1998.05.28 |
申请人 |
FORSCHUNGSVERBUND BERLIN E.V. |
发明人 |
HABERLAND, KOLJA;ZETTLER, JOERG-THOMAS |
分类号 |
G01J3/42;G01J4/04;G01N21/21;(IPC1-7):G01J3/42;G01N21/55 |
主分类号 |
G01J3/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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