| 摘要 |
The immersion lens has a first magnetic lens arrangement (30) with a bore for the passage of an incident electron beam, which generates a first magnetic field. A second magnetic lens (35) generates a second magnetic field which converges the electron beam. The combined magnetic field converges the beam between the first and second lens arrangements. The second magnetic lens arrangement contains a permanent magnet. An Independent claim is also included for an electron beam projection system.
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