摘要 |
The invention relates to a plasma torch with a microwave transmitter which, for example, is used to coat surfaces and to produce radicals. The inventive plasma torch is characterized by exhibiting a minimal energy loss during the transmission of microwaves to the produced plasma flame. The plasma torch comprises a waveguide for the transmitted microwaves and has a coaxial conductor. An electrode provided with a duct, and a nozzle provided on the end of the duct, said end facing away from the waveguide, are arranged in said coaxial conductor in an essentially axial manner. The plasma flame is produced at the nozzle. A coupling element is arranged between the waveguide and the coaxial conductor. The electrode is connected to the coupling element via a mounting plate and an electrically insulating intermediate element in a gastight, thermally insulated manner such that microwaves are permitted to pass through.
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