发明名称 HEAT TREATMENT METHOD FOR SEMICONDUCTOR SUBSTRATES
摘要 The invention concerns a method for treating a substrate comprising a semi-conducting layer (4) on at least one of its surfaces. Said method comprises a step for annealing the substrate and a step for forming an oxide layer (6) at the semi-conducting layer (4) surface, carried out before the end of the annealing step, protecting the remainder of the semi-conducting layer (4).
申请公布号 WO9952145(A1) 申请公布日期 1999.10.14
申请号 WO1999FR00786 申请日期 1999.04.06
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;MALEVILLE, CHRISTOPHE;BARGE, THIERRY;ASPAR, BERNARD;MORICEAU, HUBERT;AUBERTON-HERVE, ANDRE-JACQUES 发明人 MALEVILLE, CHRISTOPHE;BARGE, THIERRY;ASPAR, BERNARD;MORICEAU, HUBERT;AUBERTON-HERVE, ANDRE-JACQUES
分类号 H01L21/324;H01L21/02;H01L21/265;H01L21/316;H01L21/322;H01L21/762;H01L27/12 主分类号 H01L21/324
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