HEAT TREATMENT METHOD FOR SEMICONDUCTOR SUBSTRATES
摘要
The invention concerns a method for treating a substrate comprising a semi-conducting layer (4) on at least one of its surfaces. Said method comprises a step for annealing the substrate and a step for forming an oxide layer (6) at the semi-conducting layer (4) surface, carried out before the end of the annealing step, protecting the remainder of the semi-conducting layer (4).
申请公布号
WO9952145(A1)
申请公布日期
1999.10.14
申请号
WO1999FR00786
申请日期
1999.04.06
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE;MALEVILLE, CHRISTOPHE;BARGE, THIERRY;ASPAR, BERNARD;MORICEAU, HUBERT;AUBERTON-HERVE, ANDRE-JACQUES