Gassensor nach dem Prinzip der Austrittsarbeitsmessung

摘要

The invention relates to a hybrid flip-chip construction of a gas sensor which functions according to the principle of measurement of work function. Said gas sensor takes the form of an economical CMOS transistor, consisting of an electrically insulating ceramic substrate (8) with electric printed conductors (14) and contacting elements. A gas sensitive layer (11) forms part of the gate insulation. The CMOS transistor (10) with source (s) and drain (D) is mounted on the ceramic substrate (8) using the flip-chip technique and contacted with the printed conductors (14) accordingly.