| 摘要 |
PROBLEM TO BE SOLVED: To simplify coordination works of a conveying fork at an arm top end of a wafer conveying robot by a method wherein an arm of the conveying robot is connected to a support jig provided at a root of the conveying fork, and the support jig is connected to the wafer conveying fork by a pin and a fixing bolt, respectively, etc. SOLUTION: A wafer received in a wafer cassette is conveyed by mounting it on a conveying fork 11 fitted to an arm 6 of a wafer conveying robot. In such a wafer conveyor, a projection is provided in one of the arm 6 of the wafer conveying robot and a support jig 8 provided at a root of the conveying fork 11 and a recess is provided in the other. This device comprises a pin 9, coupled so as to pivot a leg part 7 on both sides of the recess and the projection, and a fixing bolt 10 for fixing the leg part 7 to the projection. Further, this device comprises a pin 13, coupled so as to pivot the support jig 8 and the conveying fork 11, and a fixing bolt 14 for fixing the support jig 8 to the wafer conveying fork 11. |
