发明名称 Silicon seed crystal for the Czochralski method and method for producing a silicon single crystal
摘要 <p>There are disclosed a silicon seed crystal which is composed of silicon single crystal and used for the Czochralski method, characterized in that oxygen concentration in the seed crystal is 15 ppma (JEIDA) or less, a silicon seed crystal which is used for the Czochralski method, characterized in that the silicon seed crystal does not have a straight body, and a method for producing a silicon single crystal by the Czochralski method comprising using said seed crystal, bringing a tip end of the seed crystal into contact with a silicon melt to melt the tip end of the seed crystal, with or without performing necking operation, and growing a silicon single crystal. The method is capable of improving the rate of success in making crystals dislocation-free and the productivity of single crystal rods regardless of the use of necking operation.</p>
申请公布号 EP0949361(A2) 申请公布日期 1999.10.13
申请号 EP19990302479 申请日期 1999.03.30
申请人 SHIN-ETSU HANDOTAI COMPANY LIMITED 发明人 IINO, EIICHI;KIMURA, MASANORI
分类号 C30B15/00;C30B15/36;(IPC1-7):C30B15/36;C30B29/06 主分类号 C30B15/00
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