发明名称 SELF-ALIGNED NON-VOLATILE STORAGE CELL
摘要 <p>The invention concerns a self-aligned non-volatile storage cell in which a MOS transistor with source and drain regions (6) is introducted into the surface region of a semiconductor body (1). The floating gate (12) and control gate (16) of the MOS transistor are housed in overlapping manner in a trench (8), while the transistor channel (17) is guided laterally in a surface region of the trench (8).</p>
申请公布号 EP0948816(A1) 申请公布日期 1999.10.13
申请号 EP19970944710 申请日期 1997.09.15
申请人 INFINEON TECHNOLOGIES AG 发明人 TEMPEL, GEORG
分类号 H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L27/115 主分类号 H01L21/8247
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