发明名称 Electroformed metal stamp, for defining nanostructures, is produced
摘要 A metal stamp, for defining nanostructures, is produced using a negative pattern of an electron or ion beam sensitive photolacquer (1). An Independent claim is also included for a metal stamp, produced by the above process.
申请公布号 DE19815130(A1) 申请公布日期 1999.10.14
申请号 DE19981015130 申请日期 1998.04.03
申请人 ROBERT BOSCH GMBH 发明人 HEYERS, KLAUS;ELSNER, BERNHARD
分类号 G03F7/00;(IPC1-7):G03F7/00;G03F7/11 主分类号 G03F7/00
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