发明名称 |
Electroformed metal stamp, for defining nanostructures, is produced |
摘要 |
A metal stamp, for defining nanostructures, is produced using a negative pattern of an electron or ion beam sensitive photolacquer (1). An Independent claim is also included for a metal stamp, produced by the above process.
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申请公布号 |
DE19815130(A1) |
申请公布日期 |
1999.10.14 |
申请号 |
DE19981015130 |
申请日期 |
1998.04.03 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
HEYERS, KLAUS;ELSNER, BERNHARD |
分类号 |
G03F7/00;(IPC1-7):G03F7/00;G03F7/11 |
主分类号 |
G03F7/00 |
代理机构 |
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代理人 |
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