摘要 |
<p>A laser/detector hybrid with a turning mirror (220) integrated into the photo detector chip. This allows a smaller package for the device and a simpler method for producing the laser/detector device. The laser beam is emitted along the surface of the chip towards a groove cut (210) in the chip. A mirror is mounted in the groove, and the mirror has a corrugated structure so that it will reflect the beam and convert it into multiple beams at the same time. <IMAGE></p> |