| 发明名称 |
Apparatus and method for microwave plasma process |
| 摘要 |
<p>The invention provides microwave plasma process apparatus and method in which an antenna having a tubular member curved in a circular shape and including at least one slit is disposed on a sealing member for sealing a chamber, so that microwaves can be emitted through the slit to the sealing member. <IMAGE></p> |
| 申请公布号 |
EP0949656(A2) |
申请公布日期 |
1999.10.13 |
| 申请号 |
EP19990100179 |
申请日期 |
1999.01.07 |
| 申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
MATSUMOTO, NAOKI;NAKANISHI, TOSHIO |
| 分类号 |
H01J37/32;(IPC1-7):H01J37/32 |
主分类号 |
H01J37/32 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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