发明名称 Process for producing a silicon single crystal by Czochralski method.
摘要 There is disclosed a method for producing a silicon single crystal by Czochralski method which comprises bringing a seed crystal into contact with a melt, performing a necking operation and growing a single crystal ingot characterized in that concentration of interstitial oxygen incorporated during the necking operation is 1 ppma (JEIDA) or more. There can be provided a method of producing a silicon single crystal wherein the rate of success in making a crystal dislocation free is improved in a seeding method wherein a necking operation is performed.
申请公布号 EP0949360(A1) 申请公布日期 1999.10.13
申请号 EP19990302365 申请日期 1999.03.26
申请人 SHIN-ETSU HANDOTAI COMPANY LIMITED 发明人 IINO, EIICHI
分类号 C30B15/00 主分类号 C30B15/00
代理机构 代理人
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