发明名称 Ceramic heat insulating coating of columnar structure
摘要 A novel component consists of a base bearing a ceramic heat insulating layer of columnar structure, the columns being normal to the base surface and having a mean diameter of <2.5 (preferably 0.5-2.0) mu m. Preferably, the layer consists of a 'metal-ceramic' material, especially ZrO2 stabilised with e.g. Y2O3, and the base consists of metal, especially a Ni or Co base alloy. Also claimed is a coating apparatus used to produce a heat insulating layer on a base and including (a) a holder (8) for positioning the base (2); (b) a hollow cathode arrangement (10) which allows inert gas passage and which has a cathode material (11), an anode (12), an inert gas inlet (14) and a gas outlet (13) facing the holder (8); and (c) an additional separate heater (9) for heating the base (2). Further claimed is a process for vacuum coating a base with a heat insulating layer by (i) ionising an inert gas in an oxygen-free atmosphere; (ii) using the ionised inert gas to detach metal atoms from a metallic cathode material and to entrain the atoms towards the base; and (iii) supplying oxygen to form a metal oxide before the inert gas stream reaches the base or to oxidise already deposited metal, the base being heated to a predetermined nucleation temperature of above 800 (preferably 950-1050) deg C.
申请公布号 DE19741961(A1) 申请公布日期 1998.03.26
申请号 DE19971041961 申请日期 1997.09.23
申请人 SIEMENS AG, 80333 MUENCHEN, DE;FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V., 80636 MUENCHEN, DE 发明人 BEELE, WOLFRAM, DR.-ING., 52074 AACHEN, DE;JUNG, THOMAS, DIPL.-PHYS. DR., 38110 BRAUNSCHWEIG, DE;BRAND, PETER JOCHEN, DR.-ING., 38100 BRAUNSCHWEIG, DE
分类号 C23C14/00;C23C14/08;C23C14/34;C23C14/38;C23C28/00;(IPC1-7):C23C30/00;F01D5/12 主分类号 C23C14/00
代理机构 代理人
主权项
地址