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发明名称
Via hole formation
摘要
申请公布号
GB2336243(A)
申请公布日期
1999.10.13
申请号
GB19990007923
申请日期
1999.04.07
申请人
* NEC CORPORATION
发明人
MITSUNARI * SUKEKAWA
分类号
H01L21/3205;H01L21/768;H01L23/522;(IPC1-7):H01L21/768
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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