发明名称 WORK LOADING METHOD AND SURFACE-GRINDING DEVICE WITH WORK-ALIGNMENT CORRECTING MECHANISM
摘要 PROBLEM TO BE SOLVED: To easily correct misalignment of a work to surely fit the work in a work-holding hole even when the work is supplied in a state where it is slipped out from the work-holding hole. SOLUTION: A carrier 7 having a work-holding hole 9 for fitting and holding a work W in it, a surface table 2 on which the work W held in the carrier 7 is ground, and a vibration exciting means 10 for giving vibration to the carrier 7, are provided. By vibrating the carrier 7 by means of the vibration exciting means 10, misalignment of the work W coming off the work-holding hole 9 is corrected, the work is rightly fitted in the work-holding hole 9.
申请公布号 JPH11277421(A) 申请公布日期 1999.10.12
申请号 JP19980103550 申请日期 1998.03.31
申请人 SPEEDFAM CO LTD 发明人 HAKOMORI SHUNJI
分类号 B24B37/04;B24B37/08;B24B37/27;B24B37/28;H01L21/304 主分类号 B24B37/04
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