| 摘要 |
PROBLEM TO BE SOLVED: To utilize an advantage that a thickness of a vibration plate can be controllably formed by doping p-type impurity atoms (boron atoms) in a high concentration in terms of an ink jet head and to prevent or suppress the occurrence of residual stress and a crystal defect of the vibration plate which are disadvantages due to the doping. SOLUTION: This ink jet head that comprises a nozzle 31, a vibration plate 35 provided at a part of an ink passage connected to the nozzle 31 and an individual electrode 36 provided in opposition to the vibration plate 35, ejects ink drops from the nozzle 31 whereby a driving voltage is applied across a common electrode attached to the vibration plate 35 and the individual electrode, thereby deforming the vibration plate by an electrostatic force. The vibration plate 35 is formed from a silicon monocrystal. A diffusion region 34 of p-type impurity atoms is limited to a region in the thickness which is one-third or less of the whole thickness of the vibration plate 35 from the passage side and the p-type impurity atoms (boron atoms) are doped to be diffused in a high concentration (1×10<19> /cm<3> or more).
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