发明名称 Coordinate measuring apparatus and method for controlling the same
摘要 The invention is directed to a method which is provided for controlling coordinate measuring apparatus wherein a probe head (2) is moved and has a movably attached probe unit (24) attached thereto. The probe unit (24) is charged with a measurement force +E,rar F+EE meas relative to the probe head (2). The measurement force +E,rar F+EE meas operates against the mass inertial forces +E,rar F+EE zp which occur because of acceleration of the probe. The measurement force +E,rar F+EE meas is comprised of a desired measurement force +E,rar F+EE des and a corrective measurement force +E,rar F+EE corr. The desired measurement force +E,rar F+EE des is constant in magnitude and is directed perpendicularly to the surface of the workpiece (15) to be measured. The corrective measurement force +E,rar F+EE corr at least partially compensates for the mass inertial forces (+E,rar F+EE tr, +E,rar F+EE zp) which occur because of the acceleration of the probe unit (24).
申请公布号 US5966681(A) 申请公布日期 1999.10.12
申请号 US19970993990 申请日期 1997.12.18
申请人 CARL-ZEISS-STIFTUNG 发明人 BERNHARDT, RALF;RUCK, OTTO;GRUPP, GUENTER
分类号 G01B5/20;G01B5/008;G01B21/00;G05B19/401;(IPC1-7):G01B5/012;G05B19/19 主分类号 G01B5/20
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